Sweeping the lean angle can make improvements to film thickness uniformity and sidewall coverage when also keeping away from large Electricity-reflected neutral species for critical processes.
In-situ optical checking and Command is accessible through Angstrom’s optical checking & Manage deal.
Focus on rotation and carousel indexing Just about every have torque feeling, avoiding any method difficulties because of slips or jams in rotation.
In-situ ellipsometry offers critical information on the overall performance of an optical movie although it really is being deposited.
Our Reticle® ion beam sputter deposition units are intended and engineered to generate exact optical movies of the best purity, density, and security.
If it’s off by even 50 % a diploma, it'll influence the morphology of such nanostructures significantly.
Angstrom Engineering® designs and engineers Just about every Reticle® platform to provide our companions from the optics Local community the chance to develop the films they will need with great purity, density, and uniformity, Tungsten materials for electronics all in a very hugely repeatable and automatic style.
Our exceptional structure permits direct or indirect checking on the variable angle phase, eliminating the need for tooling factors or perhaps a witness glass changer. Learn more in regards to the Optical Checking & Control package deal below.
As well as sample rotation, the variable angle stage that is certainly used for Reticle® presents for in-constructed angular motion through the deposition flux.
All normal Reticle® platforms include yet another gridless close-Hall ion supply with hollow cathode neutralizer.
The deposition ion supply is directed towards a fabric goal that has been optimized in each measurement and situation for that expected deposition geometry.
Self-aligned ion optics are configured specifically for the desired deposition needs and geometry of your process.
Angstrom Engineering’s Reticle® units supply a flip-vital Resolution for all those seeking to know any optical design and style into a substantial-overall performance movie.
A shuttered QCM Positioned near the substrate provides opinions on the deposition charge and Bodily thickness with the growing film.
Considerate style with the ion beam focusing optics confines the beam totally to the realm on the goal, eradicating any hazard of contamination.